Seminar Report on MEMS (Micro-electromechanical Systems)

MEMS has been identified as one of the most promising technologies for the 21st Century and has the potential to revolutionize both industrial and consumer products by combining silicon-based microelectronics with micromachining technology. Its techniques and microsystem-based devices have the potential to dramatically affect of all of our lives and the way we live. This report presents a general introduction to the field of MEMS, with emphasis on its commercial applications and device fabrication methods.It also describes the range of MEMS sensors and actuators, the phenomena that can be sensed or acted upon with MEMS devices, and outlines the major challenges facing the industry.
mems seminar report pdf ppt
MEMS are also referred to as micromachines in Japan, or micro systems technology (MST) in Europe. MEMS are made up of components between 1 and 100 micrometres in size (i.e., 0.001 to 0.1 mm), and MEMS devices generally range in size from 20 micrometres to a millimetre (i.e., 0.02 to 1.0 mm), although components arranged in arrays (e.g., digital micromirror devices) can be more than 1000 mm2. They usually consist of a central unit that processes data (the microprocessor) and several components that interact with the surroundings such as microsensors. Because of the large surface area to volume ratio of MEMS, forces produced by ambient electromagnetism (e.g., electrostatic charges and magnetic moments), and fluid dynamics (e.g., surface tension and viscosity) are more important design considerations than with larger scale mechanical devices. MEMS technology is distinguished from molecular nanotechnology or molecular electronics in that the latter must also consider surface chemistry.

Why Micromachine?

• Minimize energy and materials use in manufacturing
• Redundancy and arrays
• Integration with electronics
• Reduction of power budget
• Faster devices
• Increased selectivity and sensitivity
• Exploitation of new effects through the breakdown of continuum theory in the micro-domain
• Cost/performance advantages
• Improved reproducibility (batch fabrication)
• Improved accuracy and reliability
• Minimally invasive (e.g. pill camera)

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